20/09/2007Telstar Vacuum Solutions Successfully installs a machine for fine multilayer deposition by "Sputtering" in the ESRF.

Last September Telstar Vacuum Solutions successfully completed the installation phase of the Machine for fine multilayer deposition by "Sputtering" in the ESRF (European Synchrotron Radiation Facility), with very promising current and future results.

The ESRF's Optical Group has had a laboratory for deposition of multiple layers for more than 10 years. During 2003, the ESRF decided to renovate this installation and acquire a new system for deposition by "Sputtering". After over a year of contacting external companies and internal deliberation, Spanish company Telstar, with the technological contribution of GENCOA, was selected to supply and install the new machine.

The ESRF's main reason for acquiring the new machine is the growing need for more sophisticated technology in multiple layer deposition. This implies greater accuracy, greater stability and the repeatability of the process. The specifications have also been extended to obtain a much more flexible machine to meet the large variety of requirements from the various researchers.

This innovating "Sputtering" technique consists of bombarding the surface of the material to be evaporated -called target- with high-energy gas ions. By banging together, the ions transmit their energy to the atoms of the target, which is then pulverised. The extracted atoms can then be deposited on a substrate to form thin sheets or coatings.

The new installation is currently in the test phase, although the general technical requirements specified during the design process have already been reached. Initial test layers under predetermined working conditions of p(Ar) = 1 μbar and Φ(Ar) = 10 sccm yield very promising results for single layers and for multiple layers.

Magnetron "sputtering" provides a slightly higher mass-density contrast than the DECR technique. Bearing in mind the tests carried out, the machine has the potential to quickly and accurately provide depositions of several layers of materials. Moreover, the machine's modular design leaves room for possible future technical developments.

By commissioning this installation, Telstar Vacuum Solutions has proven its ability to design, develop and implement systems and installations in environments using high vacuum and ultra-high vacuum technologies.